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Thinfilm Deposition & Etch Equipment

        • Sputtering (PVD)
        • Evaporation
        • Plasma Enhanced CVD
        • Reactive Ion Etch
        • Plasma Strip
        • Disc Coaters
        • CVD Arc Coating
        • Robotics and Automation
        • Thinfilm Coating Services

High Volume Production Systems

Substrates sizes up to:

300 mm

Wafers

2000x1000 mm

Glass

2000 mm/ Web

Plastics

Applications:

Semiconductor

Flat Panel Display: LCD, PDP, OLED

Data Storage: Hard Disc, DVD RW

Solar Cells

Optical Coating

HDI, Multi-Chip

Architectural/Automotive Plastics 

Flexible substrate,  Roll , Web

Architectural Glass (AR)

Passive Components: Cap/Res, Medical

 

   

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